PRODUCT RANGE OPTICAL SENSORS WM | RS-C

Roughness standard Super Fine Characteristic honing structure

X-ray detector Polished surface

TECHNICAL SPECIFICATIONS

Physical measuring principleSurfacemeasuring white lightinterferometer (short coherent)
Light sourceLED(blue)
Weight / g~750
Measuring fi eld / PixelPoint cloud with >2 mi triallion individual measure ngles per individual meament points (full ROI) ; STL surement (full ROI) ; Repmesh with >4 million ort
Vertical resolution / nm5
Unit dimension with lens / mm5371159
Lens Magnifi cation10x20x50x100x
Numerical aperture (NA / AN)0,300,400,550,70
Working distance / mm7,44,73,42,0
Measuring fi eld / (µm x µm)1056,0 x 594,0528,0 x 297,0211,2 x 118,8105,6 x 59,4
Horizontal resolution / nm55027511055

*The atomic shell is the actual physical resolution limit (without fi ltering) **The values may vary depending on the design of the lens used! ***The resolution limit is in any case the diffraction limit due to physical reasons!

YOUR ADVANTAGES AT A GLANCE

P High Productivity High fl exibility

Interchangeable system | Fully integrated in WM | Sensor can be changed like a touch probe | Integrated Quartis | Working in the component coordinate system | in 5-axis measuring machine WENZEL CORE | Use as

Fully integrated in automated measuring sequence stand-alone device 125