Performance Verification

E: maximum permissible E: maximum permissible R: maximum permissible
error of length measurement0,MPE error of length 150,MPElimit of the repeatability range0,MPL
5 gauges have to be measured 35 length gauges have to beExtreme value of the repeatabi-
times with one probing at eachmeasured 3 times in the YZ- orlity range of the length measu-
end, in 7 different directions. AllXZ plane with opposite styli,rement error, calculated by three
measuring results must be withinmounted 150 mm off the Zrepeated measurements on each
E .spindle axis.size for a total of 35 values. The
035 repeatability range results
must be within the specified
P. R
: maximum permissible MPE: maximum permissible 0,MPL

single stylus form errorFTU,MPE scanning probing errorTHP/t

A precision sphere has to be A precision sphere has to be measured with 25 probings. P scanned with 4 defined lines. THP

is the range of all radii. FTU is the range of all radii.

P= sphere form, - R THP = R = sphere form. - R = R
Calibration sphere in the middle FTUmaxminscanning. Calibration sphere in maxmin
of the volume.the middle of the volume.
Technical Characteristics
Mechanical Frame:X: Micromachined anodized light alloy extrusion
Y: Integral dovetail guideways, machined into the table
Z: Micromachined anodized light alloy extrusion
Surface Plate: Material: Granite
Part Locking: threaded inserts M8 x 1.25
Flatness: according to DIN 876/III
Sliding System: Air bearings on all axes
Measuring System:METALLUR® linear scales. System Resolution: 0.039 μm
Temperature Compensation:Structural multi-sensor temperature compensation
Ram Counterbalance:Pneumatic, adjustable
Bellows and Covers:X and Y air bearing guideways with bellows
Air Supply: Minimum air supply pressure: 0.5 MPa
Air consumption: 150 Nl/min
Environment: Metrological specification temperature range: 18 ÷ 22 °C; 16 ÷ 26 °C; 15 ÷ 30 °C
Operating temperature: 10 ÷ 40 °C
Relative humidity: 20% - 90 % non condensing
Probe Heads and Sensors:HH-A, HH-AS8, HP-S-X1C, HP-S-X3C, HP-S-X5

TP200, HP-T, HP-TM, HP-S-X1, HP-L-10.6T